Development of spin coated mesoporous oxide films for MEMS structures

Journal

Journal of Electroceramics

Journal Volume

13

Journal Issue

1-3

Pages

423-428

Date Issued

2004

Author(s)

Paik, J.-A.

Fan, S.-K.

Chang, H.

Kim, C.-J.

Wu, M.C.

Dunn, B.

DOI

10.1007/s10832-004-5136-5

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-17044440110&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/309693

Type

journal article