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Abnormal Trend Detection of End-of-line Data Using EWMA method
Journal
Semiconductor Manufacturing Technology Workshop
Date Issued
1996-10
Author(s)
J. Lee
S. Chang
RUEY-SHAN GUO
J. Fan
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/326115
https://www.scopus.com/inward/record.uri?eid=2-s2.0-0030395438&partnerID=40&md5=f534b4d78795d1ad0c90308ac98d11fe
Type
conference paper