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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Growth of β-SiC on Si and poly-Si on β-SiC by rapid thermal chemical vapor deposition
Details
Growth of β-SiC on Si and poly-Si on β-SiC by rapid thermal chemical vapor deposition
Journal
Materials Research Society Symposium
Journal Volume
470
Pages
127-132
Date Issued
1997
Author(s)
CHEE-WEE LIU
Liu, C.W.
Sturm, J.C.
CHEE-WEE LIU
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-0031378421&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/332402
Type
conference paper