Precision fabrication of an arrayed micro metal probe by the laser-LIGA process
Journal
Journal of Micromechanics and Microengineering
Journal Volume
15
Journal Issue
12
Pages
2433-2440
Date Issued
2005
Author(s)
Liao, Y.-S.
Abstract
In this study, a novel process is developed to fabricate an array of micro metal probes with various geometries. In this process, a BK7 glass substrate is masked and irradiated with the UV beam (193 nm) generated by an ArF excimer laser, and the irradiation area forms tapered holes with a predetermined pattern. These holes are firstly coated with sputtered chromium (50 nm) and then nickel (100 nm). Subsequently, the coating serves the function of a cathode which causes the deposition of metal (nickel–cobalt) to fill in the holes. Finally, the glass mold was removed to obtain the intended array of metal probes. This new process allows precision tuning of the size and geometry of the cast metal probes, and reduces the probe size down to a few microns with the tip radius of less than 100 nm. The effects of various parameters on the morphologies of the micro probes are investigated.
Type
journal article