Precision fabrication of an arrayed micro metal probe by the laser-LIGA process

Journal

Journal of Micromechanics and Microengineering

Journal Volume

15

Journal Issue

12

Pages

2433-2440

Date Issued

2005

Author(s)

Liao, Y.-S.

YUNN-SHIUAN LIAO

DOI

10.1088/0960-1317/15/12/027

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448666

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-27944440011&doi=10.1088%2f0960-1317%2f15%2f12%2f027&partnerID=40&md5=c4916b02ad09ca92a945c1f62d61fe3b

Type

journal article