Experimental demonstration for ultra-low on-resistance in raised source/drain In0.53Ga0.47As QW-MOSFETs with implant-free process

Journal

Journal of Physics D: Applied Physics

Journal Volume

46

Journal Issue

39

Date Issued

2013

Author(s)

Liao, M.-H.

Chan, P.-G.

DOI

10.1088/0022-3727/46/39/395101

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447964

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84884690349&doi=10.1088%2f0022-3727%2f46%2f39%2f395101&partnerID=40&md5=ea90d5601f62ffd167e75b5a76e3d6f6

Type

journal article