Efficient and accurate optical scatterometry diagnosis of grating variation based on segmented moment matching and singular value decomposition method
Journal
Microelectronic Engineering
Journal Volume
86
Journal Issue
4-6
Pages
999-1003
Date Issued
2009
Author(s)
Liu, J.-H.
Liu, C.-W.
Huang, K.-J.
Li, T.-Y.
Chiu, M.-C.
Hong, J.-J.
Chen, C.C.-P.
Jao, C.-S.
Type
journal article