Dynamic out-of-plane profilometry for nano-scale full field characterization of MEMS with automatic detection of vibratory modes and MHz-scale measurement bandwidth

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

6382

Date Issued

2006

Author(s)

Chen, L.-C.

Lai, H.-W.

Chang, C.C.

Huang, Y.-T.

Chen, J.-L.

LIANG-CHIA CHEN

DOI

10.1117/12.685976

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447887

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33846197009&doi=10.1117%2f12.685976&partnerID=40&md5=9e006eea1f81e730448c438987926ad1

Type

conference paper