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College of Engineering / 工學院
Chemical Engineering / 化學工程學系
Processing, properties, and CMP characteristics of a spin-on polymer: HSQ
Details
Processing, properties, and CMP characteristics of a spin-on polymer: HSQ
Journal
Materials Research Society Symposium
Journal Volume
612
Date Issued
2000
Author(s)
Lin, W.-J.
Yang, C.-J.
WEN-CHANG CHEN
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-0034428450&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/289056
Type
conference paper