Low-actuation voltage MEMS digital-to-analog converter with parylene spring structures

Journal

Sensors (Switzerland)

Journal Volume

15

Journal Issue

9

Pages

21567-21580

Date Issued

2015

Author(s)

Ma, C.-W.

Lee, F.-W.

Liao, H.-H.

Kuo, W.-C.

Yang, Y.-J.

DOI

10.3390/s150921567

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448467

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84940689203&doi=10.3390%2fs150921567&partnerID=40&md5=6ad81fb8146c04074fe7ac3cb502425c

Type

journal article