The Characteristic of Abrasive Particle in Chemical – Mechanical Polishing

Journal

Material Science Forum

Journal Volume

505-507

Pages

pp.805-810

Date Issued

2006

Author(s)

H. J. Tsai

C. C. Chang

Y. R. Jeng

S. L. Chen

URI

http://www.elsevier.com/locate/issn/13594311

https://scholars.lib.ntu.edu.tw/handle/123456789/584175

Type

journal article