https://scholars.lib.ntu.edu.tw/handle/123456789/154671
標題: | Novel three-dimensional beam tracking system for stationary-sample-type atomic force microscopy | 作者: | Hung, Shao-Kang LI-CHEN FU |
關鍵字: | Atomic force microscope (AFM); Nanotopography; Optical position measurement; Optomechatronics; Scanning probe microscope (SPM) | 公開日期: | 2006 | 卷: | 55 | 期: | 5 | 起(迄)頁: | 1648-1654 | 來源出版物: | IEEE Transactions on Instrumentation and Measurement | 摘要: | The stationary-sample (scanning-probe)-type atomic force microscope (AFM) has been demonstrated to have many advantages over its conventional counterpart: the scanning-sample (stationary-probe)-type AFM. However, its major challenge is to measure the deflection of the probe while moving in three-dimensional (3-D) space. Utilizing a distinctively arranged correction lens in the optomechatronic integrated design, this paper proposes a novel laser beam tracking system to overcome the aforementioned challenge. An innovative method to minimize "false deflection" is devised. This system has been verified to achieve high scanning speed without sacrificing high tracking accuracy. © 2006 IEEE. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/141100 https://www.scopus.com/inward/record.uri?eid=2-s2.0-33749320998&doi=10.1109%2fTIM.2006.881571&partnerID=40&md5=bdf7d9d7471b20351f7143ed37554808 |
ISSN: | 00189456 | DOI: | 10.1109/TIM.2006.881571 | SDG/關鍵字: | Atomic force microscopy; Computer simulation; Lenses; Mechatronics; Optical design; Position measurement; Tracking (position); False deflection; Laser beam tracking system; Nanotopography; Optical position measurement; Optomechatronics; Laser beams |
顯示於: | 電機工程學系 |
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