https://scholars.lib.ntu.edu.tw/handle/123456789/154676
標題: | Dual-Stage Piezoelectric Nano-Positioner Utilizing a Range-Extended Optical Fiber Fabry-Perot Interferometer | 作者: | Hung, Shao-Kang Hwu, En-Te Chen, Mei-Yung LI-CHEN FU |
關鍵字: | Adaptive control; Interferometry; Modulation; Nanopositioning; Optical fiber | 公開日期: | 2007 | 卷: | 12 | 期: | 3 | 起(迄)頁: | 291-298 | 來源出版物: | IEEE/ASME Transactions on Mechatronics | 摘要: | This paper proposes a new modulation scheme using high-order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a fiber Fabry-Perot interferometer to serve as a displacement sensor, which has two operation modes - coarse and fine modes. Integrating the afore-developed sensor, a piezoelectric actuator, and a scheduled proportional-integral/adaptive-sliding controller, we construct a dual-stage nanopositioning system. The experimental results show that the proposed system has the capability to extend the positioning range beyond the limit of the wavelength while keeping the naturally high resolution, ±5 nm, of interferometry. © 2007 IEEE. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/141125 https://www.scopus.com/inward/record.uri?eid=2-s2.0-34347375514&doi=10.1109%2fTMECH.2007.897264&partnerID=40&md5=e02dbefec8bf592d4a9cbbf7bf8c7243 |
ISSN: | 10834435 | DOI: | 10.1109/TMECH.2007.897264 | SDG/關鍵字: | Adaptive control systems; Modulation; Optical fibers; Piezoelectric actuators; Proportional control systems; Dual-stage piezoelectric nano-positioner; High-order harmonic information; Fabry-Perot interferometers |
顯示於: | 電機工程學系 |
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