https://scholars.lib.ntu.edu.tw/handle/123456789/155703
標題: | Optical characterization of GaN microcavity fabricated by wet etching | 作者: | Lu, C.-Y. Wang, S.-L. Wu, H.-M. LUNG-HAN PENG |
公開日期: | 2006 | 卷: | 3 | 起(迄)頁: | 2019-2021 | 來源出版物: | Physica Status Solidi (C) Current Topics in Solid State Physics | 摘要: | We report a novel technique to fabricate gallium nitride (GaN) microcavities by combining the methods of photo-enhanced wet chemical oxidation and crystallographic etching. Such GaN microcavities exhibit mirror-like vertical facets composing of {1100}GaN and various gemoetry of hexagonal, trigonal and cylindrical shapes. The emission spectra of the GaN micro-cavities are found in resonance with the whispering gallery (WG) modes when pumped with a 266 nm Nd:YAG laser. The signatures of GaN microcavities were further characterized by an increase of the WG mode spacing with the reduced device size and suppression of the side mode emission intensity with pump intensity. © 2006 WILEY-VCH Verlag GmbH & Co. KGaA. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/146021 https://www.scopus.com/inward/record.uri?eid=2-s2.0-33746355240&doi=10.1002%2fpssc.200565339&partnerID=40&md5=36fdf0062806d8d90094daf318eba633 |
ISSN: | 18626351 | DOI: | 10.1002/pssc.200565339 | SDG/關鍵字: | Emission spectra; GaN microcavity; Optical characterization; WG mode spacing; 68.37.Hk; 68.55.Jk; 78.55.Cr; 81.05.Ea; 82.45.Vp; Cavitation; Etching; Neodymium lasers; Optical properties; Oxidation; Resonance; Emission spectroscopy; Microcavities; Wet etching; Whispering gallery modes; Gallium nitride |
顯示於: | 電機工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。