https://scholars.lib.ntu.edu.tw/handle/123456789/155776
標題: | Gimbal-less MEMS two-axis optical scanner array with high fill-factor | 作者: | JUI-CHE TSAI Wu, M.C. |
關鍵字: | Microelectromechanical devices; Micromirror array; Optical components; Optical fiber switches; Wavelength division multiplexing (WDM); Wavelength-selective switches | 公開日期: | 2005 | 卷: | 14 | 期: | 6 | 起(迄)頁: | 1323 - 1328 | 來源出版物: | Journal of Microelectromechanical Systems | 摘要: | In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (> 96%), large mechanical scan angles (±4.4° and ±3.4°), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1 × N2 wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 μm is also achieved. © 2005 IEEE. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/147797 https://www.scopus.com/inward/record.uri?eid=2-s2.0-29244487535&doi=10.1109%2fJMEMS.2005.859193&partnerID=40&md5=ef61c65f99283477162b2b5b4d850dd6 |
ISSN: | 10577157 | DOI: | 10.1109/JMEMS.2005.859193 | SDG/關鍵字: | Adaptive optics; Micromachining; Microoptics; Mirrors; Optical communication; Optical design; Optical fiber fabrication; Optical switches; Scanning; Wavelength division multiplexing; Micromirror array; Optical components; Optical fiber switches; Optical scanner array; Surface-micromachining; Wavelength-selective switches; Microelectromechanical devices |
顯示於: | 電機工程學系 |
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