https://scholars.lib.ntu.edu.tw/handle/123456789/155785
標題: | Design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array driven by a leverage mechanism | 作者: | JUI-CHE TSAI Wu, M.C. |
關鍵字: | Comb-drive actuator; Leverage mechanism; Two-axis micromirror; Wavelength-division multiplexing (WDM); Wavelength-selective switch (WSS) | 公開日期: | 2006 | 卷: | 15 | 期: | 5 | 起(迄)頁: | 1209 - 1213 | 來源出版物: | Journal of Microelectromechanical Systems | 摘要: | We report on the design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array. The two-axis microelectromechanical-systems (MEMS) mirror is driven by electrostatic vertical comb-drive actuators through four motion amplifying levers. The maximum mechanical rotation angles are ± 6.7° at 75 V for both axes, leading to total optical scan angle of 26.8°. The resonant frequency is 5.9 kHz before metallization. A linear fill factor of 98% is achieved for the one-dimensional (1-D) micromirror array. This 1D array of two-axis micromirrors was designed for 1 × N2 wavelength-selective switches (WSSs). In addition to two-axis rotation, piston motion with a stroke of 11.7 μm is also attained. © 2006 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-33749993568&doi=10.1109%2fJMEMS.2006.880291&partnerID=40&md5=0d67e349304f78c52a52ed149e7562c0 | ISSN: | 10577157 | DOI: | 10.1109/JMEMS.2006.880291 | SDG/關鍵字: | Comb-drive actuator; Leverage mechanism; Two-axis micromirror; Two-axis scanner array; Electrostatic actuators; Metallizing; Mirrors; Natural frequencies; Wavelength division multiplexing; Microelectromechanical devices |
顯示於: | 電機工程學系 |
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