Localized CO2 laser annealing induced dehydrogenation/ablation and optical refinement of silicon-rich silicon dioxide film with embedded Si nanocrystals
Resource
Journal of Nanoscience and Nanotechnology 6 (12): 3710-3717
Journal
Journal of Nanoscience and Nanotechnology
Journal Volume
6
Journal Issue
12
Pages
3710-3717
Date Issued
2006
Date
2006
Author(s)
Lin, Gong-Ru
Lin, Chun-Jung
Chou, Li-Jen
Chueh, Yu-Lun
Type
journal article