DC Field | Value | Language |
dc.contributor | 國立臺灣大學電子工程學研究所 | zh_TW |
dc.contributor.author | 劉致為 | zh_TW |
dc.creator | 劉致為 | - |
dc.date | 2004-05-31 | - |
dc.date.accessioned | 2006-08-23T04:03:22Z | - |
dc.date.accessioned | 2018-07-10T01:17:27Z | - |
dc.date.available | 2006-08-23T04:03:22Z | - |
dc.date.available | 2018-07-10T01:17:27Z | - |
dc.date.issued | 2004-05-31 | - |
dc.identifier | 922622E002023CC3 | zh_TW |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/29238 | - |
dc.description.abstract | 傳統半導體製程使用之加熱爐由於升溫及降溫速度慢,所以製程時間長。快速熱製程
機台升溫及降溫速度快,可以大幅縮短製程時間。快速熱製程機台內的反射體對於溫度均
勻度有相當大的影響,反射體為消耗品,有其使用壽命。我們自行計算模擬並進行製程測
試實驗,製作出SD 標準差較佳之快速熱製程新型多平面反射體,受限於反射體內部需預留
水路,僅可製作出約1.5cm 之平面差距,使得補償差別未能有效顯示出來。 | zh_TW |
dc.description.abstract | Traditional furnace has long processing time, because of slow rate in rising or lowering
temperature. RTP(Rapid thermal Process) can shorten much processing time, due to fast
temperature-rising or temperature-lowering rate. The reflector in RTP has a lot of influence on
temperature uniformity. Reflector is expendable and has some lifetime. We ourselves have
simulated and experimented. We can make reflector which quality is as good as made by Jet. | en |
dc.format | application/pdf | zh_TW |
dc.format.extent | 692771 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | zh-TW | zh_TW |
dc.language.iso | zh_TW | - |
dc.publisher | 臺北市:國立臺灣大學電子工程學研究所 | zh_TW |
dc.rights | 國立臺灣大學電子工程學研究所 | zh_TW |
dc.subject | 快速熱製程 | zh_TW |
dc.subject | 反射體 | zh_TW |
dc.subject | 均勻度 | zh_TW |
dc.subject | RTP(Rapid thermal Process) | en |
dc.subject | reflector | en |
dc.subject | uniformity | en |
dc.title | 增強照射均勻度的快熱製程機台反射體之製作與可靠度測試 | zh_TW |
dc.title | Fabrication and Reliability test of Uniformity-Enhanced
Reflector in Rapid Thermal Process | en |
dc.type | report | en |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/29238/1/922622E002023CC3.pdf | - |
dc.coverage | 計畫年度:92;起迄日期:2003-06-01/2004-05-31 | zh_TW |
item.languageiso639-1 | zh_TW | - |
item.cerifentitytype | Publications | - |
item.fulltext | with fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_93fc | - |
item.openairetype | report | - |
item.grantfulltext | open | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Center for Condensed Matter Sciences | - |
crisitem.author.dept | MediaTek-NTU Research Center | - |
crisitem.author.dept | Center for Artificial Intelligence and Advanced Robotics | - |
crisitem.author.orcid | 0000-0002-6439-8754 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
Appears in Collections: | 電子工程學研究所
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