https://scholars.lib.ntu.edu.tw/handle/123456789/293153
Title: | Properties of High kappa Gate Dielectrics Gd_2O_3, Y_2O_3, and yttria stabilized ZrO2 for Si | Authors: | Kwo, J MINGHWEI HONG Kortan, AR Queeney, KL Chabal Opila Jr, YJ Muller, DA Chu, SNG Sapjeta, BJ Mannaerts, JP Boone, T others |
Issue Date: | 2001 | Journal Volume: | 1 | Start page/Pages: | 11007 | Source: | APS Meeting Abstracts | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/293153 |
Appears in Collections: | 應用物理研究所 |
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