https://scholars.lib.ntu.edu.tw/handle/123456789/293463
Title: | Surface-micromachined 2D optical scanners with optically flat single-crystalline silicon micromirrors | Authors: | Su, G.-D.J. Patterson, P.R. Wu, M.C. GUO-DUNG JOHN SU |
Issue Date: | 2001 | Journal Volume: | 4293 | Start page/Pages: | 46-53 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0034865818&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/293463 |
DOI: | 10.1117/12.426942 |
Appears in Collections: | 電機工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.