https://scholars.lib.ntu.edu.tw/handle/123456789/294650
Title: | Sub-micron gate by optical lithography using photoresist re-flow and spin-on-glass | Authors: | W.-S. Lour M.-K. Tsai K.-C. Chen Y.-W. Wu S.-W. Tan Y. J. Yang YING-JAY YANG |
Issue Date: | Jan-2001 | Start page/Pages: | 154-157 | Source: | ECS, State-of-the-art Program on Compound Semiconductors XXXV | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/294650 |
Appears in Collections: | 電機工程學系 |
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