https://scholars.lib.ntu.edu.tw/handle/123456789/302110
Title: | In-situ monitoring of thickness of quartz membrane during batch chemical etching using a novel micromachined acoustic wave sensor | Authors: | Lee, C.-Y. PING-HEI CHEN |
Issue Date: | 2003 | Start page/Pages: | 993-1000 | Source: | Annual IEEE International Frequency Control Symposium | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-12144290037&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/302110 |
Appears in Collections: | 機械工程學系 |
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