https://scholars.lib.ntu.edu.tw/handle/123456789/307554
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | JENN-GWO HWU | en |
dc.creator | Wu, You-Lin and Hwu, Jenn-Gwo | - |
dc.date.accessioned | 2018-09-10T04:48:51Z | - |
dc.date.available | 2018-09-10T04:48:51Z | - |
dc.date.issued | 1994 | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0028507995&doi=10.1143%2fJJAP.33.5101&partnerID=40&md5=ad0a00a8e77a05bb4d8a8c9591f6afb7 | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/307554 | - |
dc.description.abstract | In this work, the effect of the starting oxides with and without postoxidation annealing on the reoxidized nitrided gate oxides (RNO) and N2O-annealed oxides (NAO) of metal-oxide-semiconductor (MOS) structures is discussed. It is found that both the radiation hardness and the constant-current stress resisitance can be improved if the starting oxides of the RNO and NAO are prepared without postoxidation annealing (i.e., fast pull-out from the furnace after the oxidation is completed). The improvements are related to the excess oxygen existing in the fast- pull-out oxides, which results in higher nitrogen incorporation in the oxide and reduces the strain gradient near the oxide interface. © 1994 IOP Publishing Ltd. | - |
dc.language | en | en |
dc.relation.ispartof | Japanese Journal of Applied Physics, Part 1: Regular Papers \\& Short Notes \\& Review Papers | en_US |
dc.source | AH | - |
dc.subject.other | Constant-current stress resistance; MOS structure; N20 annealing; Postoxidation treatment; Radiation hardness; Reoxidized nitrided oxide | - |
dc.title | Effect of starting oxide preparation on electrical properties of reoxidized nitrided and N2O-annealed gate oxides | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1143/JJAP.33.5101 | - |
dc.identifier.scopus | 2-s2.0-0028507995 | - |
dc.relation.pages | 5101-5106 | - |
dc.relation.journalvolume | 33 | - |
dc.relation.journalissue | 9 A | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0001-9688-0812 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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