https://scholars.lib.ntu.edu.tw/handle/123456789/309175
Title: | 20nm silicon nanorods fabricated by reactive ion etch | Authors: | Liang, E.-Z. Huang, C.-J. CHING-FUH LIN |
Issue Date: | 2004 | Start page/Pages: | 482-484 | Source: | 2004 4th IEEE Conference on Nanotechnology | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-20344387003&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/309175 |
Appears in Collections: | 電機工程學系 |
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