https://scholars.lib.ntu.edu.tw/handle/123456789/330604
Title: | A low actuation voltage electrostatic actuator for RF MEMS switch applications | Authors: | Chu, C.-H. Shih, W.-P. Chung, S.-Y. Tsai, H.-C. Shing, T.-K. Chang, P.-Z. Shih, Wen-Pin PEI-ZEN CHANG |
Issue Date: | 2007 | Journal Volume: | 17 | Journal Issue: | 8 | Start page/Pages: | 1649-1656 | Source: | Journal of Micromechanics and Microengineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-34547657513&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/330604 |
DOI: | 10.1088/0960-1317/17/8/031 |
Appears in Collections: | 機械工程學系 |
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