https://scholars.lib.ntu.edu.tw/handle/123456789/331975
標題: | Fabrication and measurement of low-stress polyimide membrane for high-resolution variable optical attenuator | 作者: | Yeh, Y. Chiu, C. Lee, C. Li, C.-H. Chen, T.-Y. GUO-DUNG JOHN SU |
關鍵字: | Large stroke; Low stress; Polyimide; Variable optical attenuator (VOA) | 公開日期: | 2007 | 卷: | 13 | 期: | 2 | 起(迄)頁: | 312-315 | 來源出版物: | IEEE Journal on Selected Topics in Quantum Electronics | 摘要: | We have fabricated low-stress polyimide membranes for use as high-resolution variable optical attenuator (VOA). Polyimide membranes are assembled with fiber collimators to perform 3-D beam spoiling that varies the optical power with 0.01-dB resolution. The measured residual stress and Young's modulus of the polyimide membrane are 3.2 MPa and 15 GPa, respectively. The 41-μm deformation of the membrane is demonstrated by the electrostatic force with 170 volts. The 0.46-dB insertion loss and >15-dB dynamic range are achieved at 1550-nm wavelength. © 2007 IEEE. |
URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-34247524260&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/331975 |
DOI: | 10.1109/JSTQE.2007.893270 | SDG/關鍵字: | Dynamic range; Optical power; Polyimide membrane; Variable optical attenuator (VOA); Elastic moduli; Electrostatic force; Insertion losses; Optical collimators; Polyimides; Three dimensional; Waveguide attenuators |
顯示於: | 電機工程學系 |
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