https://scholars.lib.ntu.edu.tw/handle/123456789/331979
Title: | Microactuated micro-XYZ stages for free-space micro-optical bench | Authors: | Lin, L.Y. Shen, J.L. Lee, S.S. Su, G.D. Wu, M.C. GUO-DUNG JOHN SU |
Issue Date: | 1997 | Start page/Pages: | 43-48 | Source: | IEEE Micro Electro Mechanical Systems (MEMS) | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0030672632&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/331979 |
Appears in Collections: | 電機工程學系 |
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