https://scholars.lib.ntu.edu.tw/handle/123456789/342690
Title: | A novel curve-fitting procedure for determining proximity effect parameters in electron beam lithography | Authors: | Chun-Hung Liu Hoi-Tou Ng Philip C. W. Ng Kuen-Yu Tsai Shy-Jay Lin Jeng-Horng Chen KUEN-YU TSAI |
Issue Date: | Nov-2008 | Start page/Pages: | 71401I | Source: | Lithography Asia 2008 - Proc. SPIE | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/342690 | DOI: | 10.1117/12.804693 |
Appears in Collections: | 電機工程學系 |
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