https://scholars.lib.ntu.edu.tw/handle/123456789/342690
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chun-Hung Liu | en_US |
dc.contributor.author | Hoi-Tou Ng | en_US |
dc.contributor.author | Philip C. W. Ng | en_US |
dc.contributor.author | Kuen-Yu Tsai | en_US |
dc.contributor.author | Shy-Jay Lin | en_US |
dc.contributor.author | Jeng-Horng Chen | en_US |
dc.contributor.author | KUEN-YU TSAI | zz |
dc.creator | Chun-Hung Liu;Hoi-Tou Ng;Philip C. W. Ng;Kuen-Yu Tsai;Shy-Jay Lin;Jeng-Horng Chen | - |
dc.date.accessioned | 2018-09-10T07:08:40Z | - |
dc.date.available | 2018-09-10T07:08:40Z | - |
dc.date.issued | 2008-11 | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/342690 | - |
dc.language | en | en |
dc.relation.ispartof | Lithography Asia 2008 - Proc. SPIE | - |
dc.source | AH-anncc | - |
dc.title | A novel curve-fitting procedure for determining proximity effect parameters in electron beam lithography | - |
dc.type | conference paper | en |
dc.identifier.doi | 10.1117/12.804693 | - |
dc.identifier.scopus | 2-s2.0-62449116073 | - |
dc.relation.pages | 71401I | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.cerifentitytype | Publications | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0002-2531-1716 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
Appears in Collections: | 電機工程學系 |
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