https://scholars.lib.ntu.edu.tw/handle/123456789/342858
Title: | Optical response from lenslike semiconductor nipple arrays | Authors: | Wu, H.-M. Lai, C.-M. LUNG-HAN PENG |
Issue Date: | Nov-2008 | Journal Volume: | 93 | Journal Issue: | 21 | Start page/Pages: | 211903 | Source: | Applied Physics Letters | Abstract: | The authors reported the use of recessive size reduction in self-assembled polystyrene sphere mask with anisotropic etching to form lenslike nipple arrays onto the surface of silicon and gallium nitride. These devices are shown to exhibit a filling factor near to an ideal close-packed condition and paraboloidlike etch profile with slope increased proportionally to the device aspect ratio. Specular reflectivity of less than 3% was observed over the visible spectral range for the 0.35-μm -period nipple-lens arrays. Using two-dimensional rigorous coupled-wave analysis, the latter phenomenon can be ascribed to a gradual index matching mechanism accessed by a high surface-coverage semiconductor nipple array structure. © 2008 American Institute of Physics. |
URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/342858 https://www.scopus.com/inward/record.uri?eid=2-s2.0-57049181355&doi=10.1063%2f1.3036629&partnerID=40&md5=4fd0890543bf4bdc6ffbf4586d1c44ed |
ISSN: | 00036951 | DOI: | 10.1063/1.3036629 | SDG/Keyword: | Aspect ratio; Electric conductivity; Gallium alloys; Gallium compounds; Gallium nitride; Nitrides; Polystyrenes; Semiconducting silicon; Semiconducting silicon compounds; Semiconductor materials; Silicon; Two dimensional; Array structures; Etch profiles; Filling factors; Index matching; Lens arrays; Optical responses; Polystyrene spheres; Semi-conductors; Size reductions; Specular reflectivities; Visible spectral ranges; Wave analyses; Semiconducting gallium |
Appears in Collections: | 光電工程學研究所 |
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