https://scholars.lib.ntu.edu.tw/handle/123456789/350126
Title: | Silicon waveguide sidewall smoothing by KrF excimer laser reformation | Authors: | Hung, S.-C. Liang, E.-Z. CHING-FUH LIN |
Issue Date: | 2009 | Journal Volume: | 27 | Journal Issue: | 7 | Start page/Pages: | 887-892 | Source: | Journal of Lightwave Technology | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-65749101958&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/350126 |
DOI: | 10.1109/JLT.2008.923240 |
Appears in Collections: | 電機工程學系 |
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