https://scholars.lib.ntu.edu.tw/handle/123456789/352327
DC Field | Value | Language |
---|---|---|
dc.contributor.author | L. A. Wang | en_US |
dc.contributor.author | H. L. Chen | en_US |
dc.contributor.author | LON A. WANG | zz |
dc.creator | L. A. Wang;H. L. Chen | - |
dc.date.accessioned | 2018-09-10T07:42:40Z | - |
dc.date.available | 2018-09-10T07:42:40Z | - |
dc.date.issued | 1999-01 | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/352327 | - |
dc.language | en | en |
dc.relation.ispartof | Micro- and Nano-Engineering | - |
dc.source | AH-anncc | - |
dc.title | A Novel Bottom Antireflective Coating Working for Both KrF and ArF Lithography | - |
dc.type | conference paper | en |
dc.relation.pages | 107-108 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.grantfulltext | none | - |
item.openairetype | conference paper | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
Appears in Collections: | 光電工程學研究所 |
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