https://scholars.lib.ntu.edu.tw/handle/123456789/359313
Title: | A non-delta-chrome OPC methodology for process models with three-dimensional mask effects | Authors: | Philip C. W. Ng Kuen-Yu Tsai Chih-Hsien Tang Lawrence S. Melvin III KUEN-YU TSAI |
Issue Date: | Feb-2010 | Start page/Pages: | 76402P | Source: | Advanced Lithography 2010 | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/359313 | DOI: | 10.1117/12.846687 |
Appears in Collections: | 電機工程學系 |
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