A mask-free fabrication of SU-8/silicon spherical microprobe

Journal

Microelectronic Engineering

Journal Volume

88

Journal Issue

8

Pages

2129-2131

Date Issued

2011

Author(s)

Tsai, Yao-Chuan

Wu, Ming-Dao

DOI

10.1016/j.mee.2010.12.091

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-79960059837&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/363646

Type

journal article