https://scholars.lib.ntu.edu.tw/handle/123456789/365220
Title: | Voltage linearity improvement of HfO<inf>2</inf>-based metal-insulator- metal capacitors with H<inf>2</inf> O prepulse treatment | Authors: | CHEE-WEE LIU Lin, C.-M. Chen, Y.-T. Lee, C.-H. Chang, H.-C. Chang, W.-C. Chang, H.-L. CHEE-WEE LIU |
Issue Date: | 2011 | Journal Volume: | 158 | Journal Issue: | 2 | Source: | Journal of the Electrochemical Society | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-78650730754&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/365220 |
DOI: | 10.1149/1.3517173 |
Appears in Collections: | 電機工程學系 |
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