https://scholars.lib.ntu.edu.tw/handle/123456789/379950
Title: | Errutum: Multifunction thermopile sensors fabricated with a MEMS-compatible process (IEEE Transactions on Semiconductor Manufacturing 2013) 26:2 (242-247)) | Authors: | Sin, L.-M. Pan, T.-T. Tsai, C.-W. Chou, C.-F. Hong, J.-Q. Tsai, J.-C. JUI-CHE TSAI |
Issue Date: | 2013 | Journal Volume: | 26 | Journal Issue: | 3 | Source: | IEEE Transactions on Semiconductor Manufacturing | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84881359298&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/379950 |
DOI: | 10.1109/TSM.2013.2272113 |
Appears in Collections: | 光電工程學研究所 |
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