https://scholars.lib.ntu.edu.tw/handle/123456789/387124
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yang, S.-T. | en_US |
dc.contributor.author | Liu, C.-T. | en_US |
dc.contributor.author | Thiyagu, S. | en_US |
dc.contributor.author | Hsueh, C.-C. | en_US |
dc.contributor.author | CHING-FUH LIN | en_US |
dc.date.accessioned | 2018-09-10T14:57:37Z | - |
dc.date.available | 2018-09-10T14:57:37Z | - |
dc.date.issued | 2014 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-84919480777&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/387124 | - |
dc.language | en | en |
dc.relation.ispartof | 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014 | en_US |
dc.source | AH-Scopus to ORCID | - |
dc.title | Fabrication of silicon thin film by metal-assisted chemical etching | - |
dc.type | conference paper | en |
dc.identifier.doi | 10.1109/NANO.2014.6967974 | - |
dc.relation.pages | 799-800 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0003-3787-2163 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
Appears in Collections: | 電機工程學系 |
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