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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Stress and curvature of periodic trench structures on Sapphire substrate with GaN film
Details
Stress and curvature of periodic trench structures on Sapphire substrate with GaN film
Journal
Procedia Engineering
Journal Volume
79
Pages
328-332
Date Issued
2014
Author(s)
Hsieh, C.F.
Chen, C.W.
Chen, C.H.
Liao, M.H.
DOI
10.1016/j.proeng.2014.06.350
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/404503
Type
conference proceeding
