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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
STI Geometric Influence of a Recessed Surface on Array-type Arrangements of Nano-scaled Devices Strained by CESL and Ge-based Stressors
Details
STI Geometric Influence of a Recessed Surface on Array-type Arrangements of Nano-scaled Devices Strained by CESL and Ge-based Stressors
Journal
Thin Solid Films
Journal Volume
618
Pages
172
Date Issued
2016
Author(s)
M. H.Liao
C. C. Lee
C.-P. Hsieh
P.-C. Huang
S.-W. Cheng
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/404546
Type
journal article
