Process Control System for VLSI Fabrication

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

4

Journal Issue

2

Pages

134-144

Date Issued

1991

Author(s)

Sachs, E.

Ha, S.

Hu, A.

DOI

10.1109/66.79725

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0026154983&doi=10.1109%2f66.79725&partnerID=40&md5=a62394782230ff53c20d86cf41f897e0

https://scholars.lib.ntu.edu.tw/handle/123456789/407849

Type

journal article