https://scholars.lib.ntu.edu.tw/handle/123456789/409117
標題: | A Low-Cost and Flexible Microplasma Generation Device to Create Hydrophobic/Hydrophilic Contrast on Nonflat Surfaces | 作者: | Yang Y.-J. Kao P.-K. Hsu C.-C. |
關鍵字: | Fluorocarbonmaskless patterningmicroplasmapolymerization | 公開日期: | 2015 | 卷: | 24 | 期: | 6 | 起(迄)頁: | 1678-1680 | 來源出版物: | Journal of Microelectromechanical Systems | 摘要: | This letter presents a low-cost (<0.25 USD per device), easy-to-fabricated, and flexible microplasma generation device (MGD), and the use of this device to perform surface patterning. This dielectric-barrier-discharge-type MGD is made of double-side copper clad laminates and the electrode patterns were fabricated by a printed circuit board fabrication-based method, which allows the patterning without lithographic processes with good feature transfer fidelity. The MGD was utilized to create hydrophilic/hydrophobic contrast by a maskless patterning process, either creating hydrophobic patterns on hydrophilic surfaces or hydrophilic pattern on hydrophobic surfaces with sub-millimeter spatial resolution. In the former case, the hydrophobic fluorocarbon polymer (FCP) patterns were deposited on glass using c-C4F8 and He plasmas. In the latter case, hydrophilic patterns were created on a FCP-coated glass substrate using the MGD operated in ambient air. We also demonstrated that the flexibility of the device enabled non-flat surface patterning. ? 1992-2012 IEEE. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/409117 | ISSN: | 10577157 | DOI: | 10.1109/JMEMS.2015.2457236 |
顯示於: | 化學工程學系 |
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