Fully monolithic CMOS nickel micromechanical resonator oscillator
Journal
IEEE International Conference on Micro Electro Mechanical Systems
Pages
10-13
ISBN
9781424417933
Date Issued
2008
Author(s)
Abstract
A fully monolithic oscillator achieved via MEMS-last integration of low temperature nickel micromechanical resonator arrays over finished foundry CMOS circuitry has been demonstrated with a measured phase noise of -95 dBc/Hz at a 10-kHz offset from its 10.92-MHz carrier (i.e., output) frequency. The use of a side-supported flexural-mode disk resonator-array to boost the power handling of the resonant tank is instrumental to allowing adequate oscillator performance despite the use of low-temperature nickel structural material. Because the fabrication steps for the resonator-array never exceed 50¢XC, the process is amenable to not only MEMS-last monolithic integration with the 0.35 £gm CMOS of this work, but also next generation CMOS with gate lengths 65 nm and smaller that use advanced low-k dielectric material to lower interconnect capacitance. ?2008 IEEE.
SDGs
Type
conference paper