https://scholars.lib.ntu.edu.tw/handle/123456789/411559| Title: | 濕蝕刻壓電材料之厚度即時監控方法 | Authors: | 陳炳煇 | Issue Date: | 2004 | Patent Number: | 中華民國專利 206714 | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/411559 |
| Appears in Collections: | 機械工程學系 |
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