https://scholars.lib.ntu.edu.tw/handle/123456789/415781
Title: | On the design of the latch mechanism for wafer containers in a SMIF environment | Authors: | J.J. Lee D.Z. Chen W.M. Pai |
Issue Date: | 2006 | Start page/Pages: | p.2025-2033 | Source: | Journal of Mechanical Science and Technology | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/415781 |
Appears in Collections: | 機械工程學系 |
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