Metallization on semiconductors in the single digit nanometer regime

Journal

IEEE Transactions on Nanotechnology

Journal Volume

5

Journal Issue

5

Pages

459-465

Date Issued

2006

Author(s)

Lung, C.-H.

DOI

10.1109/TNANO.2006.880421

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33749009743&doi=10.1109%2fTNANO.2006.880421&partnerID=40&md5=cbc0fca3187e2ae5cf16bb872bb7f105

https://scholars.lib.ntu.edu.tw/handle/123456789/415973

Type

journal article