Ultrafast atmospheric-pressure-plasma-jet processed conductive plasma-resistant Y2O3/carbon-nanotube nanocomposite

Abstract

We developed an ultrafast sintering process for a conductive plasma-resistant Y2O3/carbon-nanotube composite using an atmospheric-pressure-plasma jet (APPJ). The processing time can be as short as 3-5 s. The incorporation of carbon nanotubes (CNTs) significantly improves the conductivity. A N2 APPJ reacts violently with the CNTs and carbonaceous materials in the screen-printed pastes, enabling ultra-fast processing. The synthesized films show great erosion resistance to low-pressure CHF3 inductively coupled plasma (ICP). The conductivity remains at a similar level after exposure to the CHF3 ICP for 30 min. This coating can serve as a protective layer in a low-pressure plasma environment. The high conductivity (?0.01 S cm-1) is advantageous in preventing arcing or charging effects in the low-pressure plasma environment. ? 2015 Elsevier B.V. All rights reserved.