https://scholars.lib.ntu.edu.tw/handle/123456789/425218
標題: | Ultrafast atmospheric-pressure-plasma-jet processed conductive plasma-resistant Y2O3/carbon-nanotube nanocomposite | 作者: | Wu C.-H. Chen J.-Z. JIAN-ZHANG CHEN |
關鍵字: | Atmospheric pressure plasma jet;Carbon nanotube;Composite;Nanoporous;Screen-printing;Y2O3 | 公開日期: | 2015 | 卷: | 651 | 起(迄)頁: | 357-362 | 來源出版物: | Journal of Alloys and Compounds | 摘要: | We developed an ultrafast sintering process for a conductive plasma-resistant Y2O3/carbon-nanotube composite using an atmospheric-pressure-plasma jet (APPJ). The processing time can be as short as 3-5 s. The incorporation of carbon nanotubes (CNTs) significantly improves the conductivity. A N2 APPJ reacts violently with the CNTs and carbonaceous materials in the screen-printed pastes, enabling ultra-fast processing. The synthesized films show great erosion resistance to low-pressure CHF3 inductively coupled plasma (ICP). The conductivity remains at a similar level after exposure to the CHF3 ICP for 30 min. This coating can serve as a protective layer in a low-pressure plasma environment. The high conductivity (?0.01 S cm-1) is advantageous in preventing arcing or charging effects in the low-pressure plasma environment. ? 2015 Elsevier B.V. All rights reserved. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/425218 | ISSN: | 09258388 | DOI: | 10.1016/j.jallcom.2015.08.085 |
顯示於: | 應用力學研究所 |
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