Silicon thin-film transistors on flexible polymer foil substrates
Journal
International Meeting on Information Display
Journal Volume
8
Pages
1455-1458
Date Issued
2008
Author(s)
Abstract
Amorphous silicon (a-Si:H) thin-film transistors (TFTs) are fabricated on flexible organic polymer foil substrates. As-fabricated performance, electrical bias-stability at elevated temperatures, electrical response under mechanical flexing, and prolonged mechanical stability of the TFTs are studied. TFTs made on plastic at ultra low process temperatures of 150¢XC show initial electrical performance like TFTs made on glass but large gate-bias stress instability. An abnormal saturation of the instability against operation temperature is observed.
Subjects
Amorphous silicon
Plastic substrate
Thin film transistor
Type
conference paper