https://scholars.lib.ntu.edu.tw/handle/123456789/425325
標題: | Phase transitions of room temperature RF-sputtered ZnO/Mg 0.4Zn 0.6O multilayer thin films after thermal annealing | 作者: | Chen J.Z. Li C.-H. JIAN-ZHANG CHEN I-CHUN CHENG |
關鍵字: | Annealing;Crystal microstructure;Magnesium zinc oxide;Multilayers;Phase transition;X-ray diffraction;Zinc oxide | 公開日期: | 2012 | 卷: | 520 | 期: | 6 | 起(迄)頁: | 1918-1923 | 來源出版物: | Thin Solid Films | 摘要: | We report the thermal stability of room-temperature RF-sputtered Mg 0.4Zn 0.6O thin films and ZnO/Mg 0.4Zn 0.6O superlattices at 600 ¢XC and 800 ¢XC. The phase of room-temperature as-sputtered Mg 0.4Zn 0.6O is crystalline ZnO embedded in an amorphous or short-range-ordered hexagonal MgZnO matrix. Annealing at either 600 ¢XC or 800 ¢XC for 5 min transforms the matrix into a crystalline hexagonal wurtzite structure, leading to a decrease of the optical bandgap (E g) of Mg 0.4Zn 0.6O. This also results in a slight change near the absorption edge of the superlattice transmission spectrum. The films precipitate cubic MgZnO after heating Mg 0.4Zn 0.6O at 800 ¢XC for 5 min; by contrast, precipitations take at least 3 h if the samples are heated at 600 ¢XC. Heating at 800 ¢XC for more than 3 h significantly reduces the film thickness and E g, attributed to the decomposition of superlattices and diffusion of magnesium into the substrate, respectively. On the other hand, annealing the ZnO/Mg 0.4Zn 0.6O superlattice at 600 ¢XC for 12 h also produces an initial slight change in the optical transmission spectra, yet the spectra remain essentially unchanged for the remainder of the annealing process. ? 2011 Elsevier B.V. All rights reserved. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/425325 | ISSN: | 00406090 | DOI: | 10.1016/j.tsf.2011.09.052 |
顯示於: | 應用力學研究所 |
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