https://scholars.lib.ntu.edu.tw/handle/123456789/427782
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chia-Feng Liao | en_US |
dc.contributor.author | Chun-Hsien Lin | en_US |
dc.contributor.author | Pei-Yi Su | en_US |
dc.contributor.author | Yi-Ming Dai | en_US |
dc.contributor.author | Chung-Hsing Lee | en_US |
dc.contributor.author | Chien-Ko Liao | en_US |
dc.contributor.author | Chun-Yung Chang | en_US |
dc.contributor.author | Nan-Jung Chen | en_US |
dc.contributor.author | Pei-Yuan Wu | en_US |
dc.contributor.author | Hsien-Mao Huang | en_US |
dc.contributor.author | PEI-YUAN WU | en_US |
dc.creator | PEI-YUAN WU;Hsien-Mao Huang;Pei-Yuan Wu;Nan-Jung Chen;Chun-Yung Chang;Chien-Ko Liao;Chung-Hsing Lee;Yi-Ming Dai;Pei-Yi Su;Chun-Hsien Lin;Chia-Feng Liao | - |
dc.date.accessioned | 2019-10-24T08:00:15Z | - |
dc.date.available | 2019-10-24T08:00:15Z | - |
dc.date.issued | 2017 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/427782 | - |
dc.title | Photolithography tool and method thereof | en_US |
dc.type | patent | en |
dc.identifier.patentno | US20170123328A1 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Patents | - |
item.openairetype | patent | - |
item.openairecristype | http://purl.org/coar/resource_type/c_15cd | - |
item.grantfulltext | none | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Communication Engineering | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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